Digital holography for MEMS and microsystem metrology
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Chichester, West Sussex, U.K. ; Hoboken, N.J. :
Wiley,
2011.
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| Series: | The Wiley microsystem and nanotechnology series
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| Subjects: | |
| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10484809 |