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01087nam a2200253 a 4500 |
| 001 |
1835276 |
| 005 |
20171111234619.0 |
| 008 |
110415s2011 enkacd sb 001 0 eng d |
| 020 |
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|z 9780470978696 (cloth)
|z 9781119997306 (ePDF)
|z 9781119997290 (oBook)
|z 9781119972785 (ePub)
|z 9781119972792 (Mobi)
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| 040 |
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|a CaPaEBR
|z 9781119997306 (e-book)
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| 050 |
1 |
4 |
|a TK7875
|b .D54 2011eb
|
| 245 |
0 |
0 |
|a Digital holography for MEMS and microsystem metrology
|c edited by Anand Asundi.
|
| 260 |
|
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|a Chichester, West Sussex, U.K. ;
|b Wiley,
|c 2011.
|a Hoboken, N.J. :
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| 300 |
|
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|a xxii, 205 p. :
|b ill., port.
|
| 490 |
1 |
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|a The Wiley microsystem and nanotechnology series
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Measurement.
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| 650 |
|
0 |
|a Microelectronics
|x Measurement.
|
| 650 |
|
0 |
|a Holographic testing.
|
| 650 |
|
0 |
|a Image processing
|x Digital techniques.
|
| 700 |
1 |
|
|a Asundi, Anand.
|
| 710 |
2 |
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|a ebrary, Inc.
|
| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10484809
|
| 952 |
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|a CY-NiOUC
|b 5a045e246c5ad14ac1edc339
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|
