Description: Digital holography for MEMS and microsystem metrology

Corporate Author:	ebrary, Inc.
Other Authors:	Asundi, Anand.
Format:	Book
Language:	English
Published:	Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011.
Series:	The Wiley microsystem and nanotechnology series
Subjects:	Microelectromechanical systems > Measurement. Microelectronics > Measurement. Holographic testing. Image processing > Digital techniques.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10484809

Physical Description:	xxii, 205 p. : ill., port.
Bibliography:	Includes bibliographical references and index.