An introduction to microelectromechanical systems engineering
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| Format: | Book |
| Language: | English |
| Published: |
Boston :
Artech House,
2004.
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| Edition: | 2nd ed. |
| Series: | Artech House microelectromechanical systems (MEMS) series
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| Subjects: | |
| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10081925 |