Description: An introduction to microelectromechanical systems engineering

Main Author:	Maluf, Nadim.
Corporate Author:	ebrary, Inc.
Other Authors:	Williams, Kirt.
Format:	Book
Language:	English
Published:	Boston : Artech House, 2004.
Edition:	2nd ed.
Series:	Artech House microelectromechanical systems (MEMS) series
Subjects:	Microelectromechanical systems.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10081925

Physical Description:	xx, 282 p. : ill.
Bibliography:	Includes bibliographical references and index.