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040514s2004 maua sb 001 0 eng d |
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|z 1580535917
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|a CaPaEBR
|z 1580535909 (alk. paper)
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| 050 |
1 |
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|a TK7875
|b .M35 2004eb
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| 100 |
1 |
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|a Maluf, Nadim.
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| 245 |
1 |
3 |
|a An introduction to microelectromechanical systems engineering
|c Nadim Maluf, Kirt Williams.
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| 250 |
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|a 2nd ed.
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| 260 |
|
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|a Boston :
|b Artech House,
|c 2004.
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| 300 |
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|a xx, 282 p. :
|b ill.
|
| 490 |
1 |
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|a Artech House microelectromechanical systems (MEMS) series
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| 504 |
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|a Includes bibliographical references and index.
|
| 650 |
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0 |
|a Microelectromechanical systems.
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| 700 |
1 |
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|a Williams, Kirt.
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| 710 |
2 |
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|a ebrary, Inc.
|
| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10081925
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| 952 |
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|a CY-NiOUC
|b 5a0456376c5ad14ac1ecd208
|c 998a
|d 945l
|e -
|t 1
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|z Books
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