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Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /

Corporate Authors:	Materials Research Society Meeting, Symposium on the Science and Technology of Microfabrication
Other Authors:	Howard, R. E.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, c1987.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses Microfabrication > Congresses

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