Description: Science and technology of microfabrication :

Corporate Authors:	Materials Research Society Meeting, Symposium on the Science and Technology of Microfabrication
Other Authors:	Howard, R. E.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, c1987.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses Microfabrication > Congresses

Item Description:	Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
Physical Description:	xvii, 373 p. : ill. ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	0931837421