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20171111231320.0 |
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870317s1987 gr gr 00010 eng d |
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|a 0931837421
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| 050 |
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|a TK7874
|b .S33 1987
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| 082 |
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|2 19
|a 621.381/73
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| 245 |
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|a Science and technology of microfabrication :
|b symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /
|c editors, R.E. Howard ... [et al.].
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| 260 |
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|a Pittsburgh, Pa. :
|b Materials Research Society,
|c c1987.
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| 300 |
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|a xvii, 373 p. :
|b ill. ;
|c 24 cm.
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| 500 |
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|a Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
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| 504 |
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|a Includes bibliographies and indexes.
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| 650 |
1 |
0 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction
|x Congresses
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| 650 |
1 |
0 |
|a Microfabrication
|x Congresses
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| 700 |
1 |
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|a Howard, R. E.
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| 710 |
0 |
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|a Materials Research Society
|b Meeting
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| 711 |
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2 |
|a Symposium on the Science and Technology of Microfabrication
|c Boston, Mass.)
|d (1986 :
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| 952 |
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|a GR-AtTEI
|b 59cc7ea86c5ad13446fd3133
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
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