Microlithography fundamentals in semiconductor devices and fabrication technology /
| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
New York :
Marcel Dekker ,
c1998 .
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| Subjects: |
| Physical Description: | v, 327 p. : ill. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0824799518 |