Holdings: Microlithography fundamentals in semiconductor devices and fabrication technology /

Main Author:	Nonogaki, Saburo 1930-
Other Authors:	Ito, Toshio, Ueno, Takumi
Format:	Book
Language:	English
Published:	New York : Marcel Dekker , c1998 .
Subjects:	Manufacturing processes Microlithography > Industrial applications Photoresists Semiconductors > Design and construction

Βιβλιοθήκη	Ταξιθετικός αριθμός	Αριθμός Αντιτύπων	Πληροφορίες	Κατάσταση
ΤΕΙ Αθήνας	-	1	Προβολή	OPAC