Holdings: Microlithography :science and technology /

Other Authors:	Sheats, James R., Smith, Bruce W.
Format:	Book
Language:	English
Published:	New York : Marcel Dekker , c1998 .
Subjects:	Integrated circuits > Masks Manufacturing processes Metal oxide semiconductors, Complementary > Design and construction Microlithography > Industrial applications

Βιβλιοθήκη	Ταξιθετικός αριθμός	Αριθμός Αντιτύπων	Πληροφορίες	Κατάσταση
ΤΕΙ Αθήνας	-	1	Προβολή	OPAC