Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
Corporate Authors: | International Symposium on Silicon Science Kiryεu-shi, Japan), ebrary, Inc., International Conference on Advanced Micro-Device Engineering |
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Other Authors: | Unno, Masafumi. |
Format: | Book |
Language: | English |
Published: |
Durnten-Zurich :
Trans Tech Publications,
2012.
|
Subjects: | |
Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10604223 |
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