Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

Corporate Authors: International Symposium on Silicon Science Kiryεu-shi, Japan), Gunma Daigaku. International Education and Research Center for Silicon Science., Gunma Daigaku. Advanced Technology Research Center., International Conference on Advanced Micro-Device Engineering
Other Authors: Hanaizumi, Osamu., Unno, Masafumi.
Format: Book
Language:English
Published: AMDE 2009 Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Subjects:
Online Access:http://site.ebrary.com/lib/ucy/Doc?id=10604228

Internet

http://site.ebrary.com/lib/ucy/Doc?id=10604228
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