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01654nam a2200289 a 4500 |
| 001 |
1821637 |
| 005 |
20171111234606.0 |
| 008 |
120510s2011 sz a sb 101 0 eng d |
| 020 |
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|z 9780878492176 (pbk.)
|z 0878492178 (pbk.)
|z 9780878492176
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| 040 |
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|a CaPaEBR
|z 9783038134817 (e-book)
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| 050 |
1 |
4 |
|a TK7871.15.S55
|b I585 2009eb
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| 111 |
2 |
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|a International Symposium on Silicon Science
|c Kiryεu-shi, Japan)
|d 2009 :
|
| 240 |
1 |
0 |
|a ISSS 2009
|
| 245 |
1 |
0 |
|a Silicon science and advanced micro-device engineering I
|b selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
|c edited by Osamu Hanaizumi and Masafumi Unno.
|
| 246 |
1 |
3 |
|a ISSS 2009
|
| 260 |
|
|
|a AMDE 2009
|b Trans Tech Publications,
|c 2011.
|a Stafa-Zurich ;
|a Enfield, N.H. :
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| 300 |
|
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|a xii, 282 p. :
|b ill.
|
| 504 |
|
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|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Silicon
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| 650 |
|
0 |
|a Nanostructures
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| 700 |
1 |
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|a Hanaizumi, Osamu.
|
| 700 |
1 |
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|a Unno, Masafumi.
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| 710 |
2 |
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|a Gunma Daigaku.
|b International Education and Research Center for Silicon Science.
|
| 710 |
2 |
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|a Gunma Daigaku.
|b Advanced Technology Research Center.
|
| 711 |
2 |
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|a International Conference on Advanced Micro-Device Engineering
|c Kiryεu-shi, Japan)
|d 2009 :
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| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10604228
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| 952 |
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|a CY-NiOUC
|b 5a045c6a6c5ad14ac1ed8ac0
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
|
