Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
| Corporate Authors: | , , |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Durnten-Zurich :
Trans Tech Publications,
2012.
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| Subjects: | |
| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10604223 |
| Physical Description: | 311 p. : ill. (some col.). |
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| Bibliography: | Includes bibliographical references and indexes. |