Nanostructure science, metrology, and technology: 5-7 September 2001, Gaithersburg, USA/
| Corporate Authors: | , , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash.:
SPIE-the International Society for Optical Engineering,
c2002
|
| Series: | SPIE proceedings series
4608 |
| Subjects: |