Description: Nanostructure science, metrology, and technology:

Corporate Authors:	Society of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.), United States. Office of Naval Research
Other Authors:	Peckerar, Martin Charles ,, Postek, Michael T.
Format:	Book
Language:	English
Published:	Bellingham, Wash.: SPIE-the International Society for Optical Engineering, c2002
Series:	SPIE proceedings series 4608
Subjects:	Nanotechnology > Congresses Nanostructures > Congresses Metrology > Congresses Microelectronics > Congresses

Item Description:	"Sponsored by SPIE-the International Society for Optical Engineering, National Institute of Standards and Technology (USA), Office of Naval Research (USA)."
Physical Description:	x, 278 p. : ill. ; 28 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	0819443476