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01373nam a2200289 a 4500 |
| 001 |
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20171111233605.0 |
| 008 |
050302s2002 cy da r 000 u eng d |
| 020 |
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|a 0819443476
|q pbk.
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| 040 |
|
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|a CY
|b University of Cyprus
|e AACR2
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| 050 |
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|a T174.7.N359 2002
|
| 245 |
1 |
0 |
|a Nanostructure science, metrology, and technology:
|b 5-7 September 2001, Gaithersburg, USA/
|c Martin C. Peckerar, Michael T. Postek, Jr., chairs/editors
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| 260 |
|
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|a Bellingham, Wash.:
|b SPIE-the International Society for Optical Engineering,
|c c2002
|
| 300 |
|
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|a x, 278 p. :
|b ill. ;
|c 28 cm.
|
| 490 |
0 |
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|a SPIE proceedings series
|v 4608
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| 500 |
|
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|a "Sponsored by SPIE-the International Society for Optical Engineering, National Institute of Standards and Technology (USA), Office of Naval Research (USA)."
|
| 504 |
|
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|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Nanotechnology
|x Congresses
|
| 650 |
|
0 |
|a Nanostructures
|x Congresses
|
| 650 |
|
0 |
|a Metrology
|x Congresses
|
| 650 |
|
0 |
|a Microelectronics
|x Congresses
|
| 700 |
1 |
|
|a Peckerar, Martin Charles ,
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| 700 |
1 |
|
|a Postek, Michael T.
|
| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers
|
| 710 |
2 |
|
|a National Institute of Standards and Technology (U.S.)
|
| 710 |
0 |
|
|a United States.
|b Office of Naval Research
|
| 952 |
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|a CY-NiOUC
|b 5a042b0c6c5ad14ac1e82637
|c 998a
|d 945l
|e T174.7.N359 2002
|t 1
|x m
|z Books
|
