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00831nam a2200241 a 4500 |
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20171111231148.0 |
| 008 |
990702s1992 gr r 000 0 eng d |
| 020 |
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|a 0306435780
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| 040 |
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|a GR-KoDPT
|b gre
|e AACR2
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| 050 |
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|a TK7874
|b .V336 1992
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| 082 |
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0 |
|2 20
|a 621.381/531
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| 100 |
1 |
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|a Valiev, Kamil Akhmetovich
|
| 245 |
1 |
4 |
|a The physics of submicron lithography/
|c Kamil A. Valiev
|
| 260 |
|
|
|a New York:
|b Plenum Press,
|c c1992
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| 300 |
|
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|a xi, 493 σ. :
|b εικ. ;
|c 26 εκ.
|
| 490 |
0 |
|
|a Microdevices
|
| 504 |
|
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|a Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο
|
| 650 |
|
0 |
|a Lithography, Electron beam
|
| 650 |
|
0 |
|a X-ray lithography
|
| 650 |
|
0 |
|a Ion beam lithography
|
| 710 |
|
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|a Plenum
|
| 952 |
|
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|a GR-KoDPT
|b 59cc2bfe6c5ad13446fa529f
|c 998a
|d 945l
|e TK 7874
|t 2
|x m
|z Books
|
