Cover Image

Silicon processing for the VLSI era/

Main Author: Wolf, Stanley, 1943-
Corporate Author: Lattice
Other Authors: Tauber, Richard N.
Format: Book
Language:English
Published: Sunset Beach, Calif.: Lattice Press, c1986-
Subjects:
Integrated circuits > Very large scale integration
Table of Contents:
  • τ. 1. Process technology
  • τ. 2. Process integration
  • τ. 3. The Submicron MOSFET

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