The physics of micro/nano-fabrication /
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Published: |
New York:
Plenum Press,
c1992
|
| Series: | Microdevices : : physics and fabrication technologies
|
| Subjects: |
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Published: |
New York:
Plenum Press,
c1992
|
| Series: | Microdevices : : physics and fabrication technologies
|
| Subjects: |