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060708s1992----gr er 000 0 Eng d |
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|a 0306441462
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| 040 |
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|a GR-AtNTU
|b gre
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| 082 |
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0 |
|a 621.381 BRO
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| 100 |
1 |
0 |
|a Brodie, Ivor
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| 245 |
1 |
4 |
|a The physics of micro/nano-fabrication /
|c Ivor Brodie and Julius J. Muray
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| 260 |
1 |
4 |
|a New York:
|b Plenum Press,
|c c1992
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| 300 |
1 |
4 |
|a xix, 650 p. :
|b figs. ;
|c 26 cm.
|
| 490 |
0 |
4 |
|a Microdevices : : physics and fabrication technologies
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| 504 |
0 |
4 |
|a Includes bibliographical references, author index and subject index.
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| 650 |
1 |
0 |
|a Microelectronics
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| 700 |
1 |
0 |
|a Muray, Julius J.
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| 952 |
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|a GR-AtNTU
|b 59cc1d2b6c5ad13446f7e9f9
|c 998a
|d 945l
|e 621.381 BRO
|t 1
|x m
|z Books
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| 952 |
|
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|a GRThAnMak
|b 59cc991f6c5ad1344600e738
|c 998a
|d 945l
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|z Books
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