The physics of micro/nano-fabrication /
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| Other Authors: | |
| Format: | Book |
| Published: |
New York:
Plenum Press,
c1992
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| Series: | Microdevices : : physics and fabrication technologies
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| Subjects: |
| Physical Description: | xix, 650 p. : figs. ; 26 cm. |
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| Bibliography: | Includes bibliographical references, author index and subject index. |
| ISBN: | 0306441462 |