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Microelectromechanical systems : advanced materials and fabrication methods /

Corporate Authors: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems., National Research Council (U.S.). National Materials Advisory Board., National Research Council (U.S.). Commission on Engineering and Technical Systems.
Format: Book
Language:English
Published: Washington, DC : National Academy Press, 1997.
Subjects:
Microelectronics > Materials.
Microelectromechanical systems > Design and construction.
Microélectronique > Matériaux.
Micromachines > Conception et construction.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Online Access:http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507

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