Description: Microelectromechanical systems :

Corporate Authors:	National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems., National Research Council (U.S.). National Materials Advisory Board., National Research Council (U.S.). Commission on Engineering and Technical Systems.
Format:	Book
Language:	English
Published:	Washington, DC : National Academy Press, 1997.
Subjects:	Microelectronics > Materials. Microelectromechanical systems > Design and construction. Microélectronique > Matériaux. Micromachines > Conception et construction. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Electronics > Digital.
Online Access:	http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507

Physical Description:	1 online resource (xiv, 61 pages) : illustrations
Bibliography:	Includes bibliographical references (pages 51-55).
ISBN:	0309059801 9780309059800 0585002509 9780585002507