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Microelectromechanical systems : advanced materials and fabrication methods /

Corporate Authors: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems., National Research Council (U.S.). National Materials Advisory Board., National Research Council (U.S.). Commission on Engineering and Technical Systems.
Format: Book
Language:English
Published: Washington, DC : National Academy Press, 1997.
Subjects:
Microelectronics > Materials.
Microelectromechanical systems > Design and construction.
Microélectronique > Matériaux.
Micromachines > Conception et construction.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Online Access:http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1507
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245 0 0 |a Microelectromechanical systems :  |b advanced materials and fabrication methods /  |c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. 
260 |a Washington, DC :  |b National Academy Press,  |c 1997. 
300 |a 1 online resource (xiv, 61 pages) :  |b illustrations 
504 |a Includes bibliographical references (pages 51-55). 
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650 7 |a TECHNOLOGY & ENGINEERING  |x Electronics  |x Digital. 
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650 7 |a Microelectronics  |x Materials. 
710 2 |a National Research Council (U.S.).  |b Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. 
710 2 |a National Research Council (U.S.).  |b National Materials Advisory Board. 
710 2 |a National Research Council (U.S.).  |b Commission on Engineering and Technical Systems. 
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