Description: High-k gate dielectrics for CMOS technology

Corporate Author:	ebrary, Inc.
Other Authors:	He, Gang.
Format:	Book
Language:	English
Published:	Weinheim : Wiley-VCH, 2012.
Subjects:	Dielectrics.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10653595

Physical Description:	xxxi, 558 p. : ill. (some col.)
Bibliography:	Includes bibliographical references and index.