Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
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| Format: | Book |
| Language: | English |
| Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
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| Series: | Nanotechnology science and technology
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| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10675006 |