Description: Low-k nanoporous interdielectrics

Main Author:	Ree, Moonhor.
Corporate Author:	ebrary, Inc.
Other Authors:	Yoon, Jinhwan.
Format:	Book
Language:	English
Published:	Hauppauge, N.Y. : Nova Science Publishers, c2010.
Series:	Nanotechnology science and technology
Subjects:	Dielectric films. Microelectronics > Materials. Porous materials.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10675006

Physical Description:	67 p. : ill.
Bibliography:	Includes bibliographical references (p. [51]-61) and index.