Polymers for microelectronics: resists and dielectrics/

Corporate Authors: American Chemical Society. Division of Polymeric Materials. Science and Engineering, American Chemical Society. Meeting
Other Authors: Willson, C. G,, Tagawa, Seiichi
Format: Book
Language:English
Published: Washington, DC: American Chemical Society, 1994
Series:ACS symposium series 537
Subjects:
ΒιβλιοθήκηΤαξιθετικός αριθμόςΑριθμός ΑντιτύπωνΠληροφορίεςΚατάσταση
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