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01348nam a2200253 a 4500 |
| 001 |
1683472 |
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20171111234403.0 |
| 008 |
020627s1994 cy da r 000 u eng d |
| 020 |
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|a 0841227217
|q hbk.
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| 040 |
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|a CY
|b University of Cyprus
|e AACR2
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| 050 |
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|a TK7871.15.P6P628 1994
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| 245 |
1 |
0 |
|a Polymers for microelectronics:
|b resists and dielectrics/
|c Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor
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| 260 |
|
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|a Washington, DC:
|b American Chemical Society,
|c 1994
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| 300 |
|
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|a xii, 571 p. :
|b ill. ;
|c 24 cm.
|
| 490 |
0 |
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|a ACS symposium series
|v 537
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| 500 |
|
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|a "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
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| 504 |
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|a Includes bibliographical references and indexes.
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| 650 |
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0 |
|a Polymers
|x Congresses
|
| 650 |
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0 |
|a Microelectronics
|x Materials
|
| 700 |
1 |
|
|a Willson, C. G,
|x Congresses
|
| 700 |
1 |
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|a Tagawa, Seiichi
|
| 710 |
0 |
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|a American Chemical Society.
|b Division of Polymeric Materials.
|b Science and Engineering
|
| 710 |
0 |
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|a American Chemical Society.
|b Meeting
|d (203rd :
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| 952 |
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|a CY-NiOUC
|b 5a04473a6c5ad14ac1eb2d2a
|c 998a
|d 945l
|e TK7871.15.P6P628 1994
|t 1
|x m
|z Books
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