Polymers for microelectronics: resists and dielectrics/
| Corporate Authors: | , |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Washington, DC:
American Chemical Society,
1994
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| Series: | ACS symposium series
537 |
| Subjects: |
| Item Description: | "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992." |
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| Physical Description: | xii, 571 p. : ill. ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 0841227217 |