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00885nam a2200241 a 4500 |
| 001 |
1763670 |
| 005 |
20171111234512.0 |
| 008 |
130422s2013 njua sb 001 0 eng d |
| 020 |
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|z 9781118062777 (cloth : alk. paper)
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| 040 |
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|a CaPaEBR
|z 9781118747421 (ebook)
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| 050 |
1 |
4 |
|a TS695
|b .K33 2013eb
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| 100 |
1 |
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|a Kaariainen, Tommi.
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| 245 |
1 |
0 |
|a Atomic layer deposition
|b principles, characteristics, and nanotechnology applications /
|c Tommi Kaariainen ... [et al.].
|
| 250 |
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|a 2nd ed.
|
| 260 |
|
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|a Hoboken, NJ :
|b John Wiley & Sons,
|c c2013.
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| 300 |
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|a xv, 253 p. :
|b ill.
|
| 504 |
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|a Includes bibliographical references and index.
|
| 650 |
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0 |
|a Chemical vapor deposition.
|
| 650 |
|
0 |
|a Epitaxy.
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| 650 |
|
0 |
|a Microelectronics.
|
| 710 |
2 |
|
|a ebrary, Inc.
|
| 856 |
4 |
0 |
|u http://site.ebrary.com/lib/ucy/Doc?id=10715316
|
| 952 |
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|a CY-NiOUC
|b 5a0454516c5ad14ac1ec98aa
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
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