Atomic layer deposition principles, characteristics, and nanotechnology applications /
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| Corporate Author: | |
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, NJ :
John Wiley & Sons,
c2013.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10715316 |
| Physical Description: | xv, 253 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |