APA Citation

Kaariainen, T. (2013). Atomic layer deposition: Principles, characteristics, and nanotechnology applications (2nd ed.). Hoboken, NJ: John Wiley & Sons.

Chicago Style Citation

Kaariainen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd ed. Hoboken, NJ: John Wiley & Sons, 2013.

MLA Citation

Kaariainen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd ed. Hoboken, NJ: John Wiley & Sons, 2013.

Warning: These citations may not always be 100% accurate.