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Smart material systems and MEMS:: design and development methodologies/

Main Author:	Varadan, Vijay K., 1943-
Other Authors:	Vinoy, Kalarickaparambil Joseph,, Gopalakrishnan, S.
Format:	Book
Language:	English
Published:	Chichester, England: John Wiley & Sons, [c2006]
Subjects:	Microelectromechanical systems

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