Principles of plasma discharges and materials processing/
| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York:
Wiley,
c1994
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| Subjects: |
| Item Description: | "A Wiley-Interscience publication." |
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| Physical Description: | xxvi, 572 p. : ill. ; 25 cm. |
| Bibliography: | Includes bibliographical references (p. 559-564) and index. |
| ISBN: | 0471005770 |