Fundamentals pf microfabrication and nanotechnology/
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton:
CRC Press,
2012
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| Edition: | 3rd |
| Subjects: |
Table of Contents:
- v. 1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
- v. 2 Manufacturing techniques for microfabrication and nanotechnology
- v. 3 From MEMS to bio-MEMS and bio-NEMS