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| LEADER |
01042nam a2200265 a 4500 |
| 001 |
1232838 |
| 005 |
20171111232638.0 |
| 008 |
111103m2012 gr erb 001 0 eng d |
| 020 |
|
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|a 9781420055115
|q (v. 1), (hbk.)
|
| 020 |
|
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|a 9781420055191:
|c (v. 2), (hbk.)
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| 020 |
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|a 9781420055160:
|c (v. 3), (hbk.)
|
| 040 |
|
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|a GrAtEKP.sci
|b gre
|e AACR2
|
| 082 |
|
0 |
|2 22
|a 620.5
|
| 100 |
1 |
|
|a Madou, Marc J.
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| 245 |
1 |
0 |
|a Fundamentals pf microfabrication and nanotechnology/
|c Marc J. Madou
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| 250 |
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|a 3rd
|
| 260 |
|
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|a Boca Raton:
|b CRC Press,
|c 2012
|
| 300 |
|
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|a 3 v. :
|b ill., diagrs, tabs ;
|c 28 cm.
|
| 504 |
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|a Includes bibliographical references and indexes.
|
| 505 |
0 |
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|a v. 1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
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| 505 |
0 |
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|a v. 2 Manufacturing techniques for microfabrication and nanotechnology
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| 505 |
0 |
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|a v. 3 From MEMS to bio-MEMS and bio-NEMS
|
| 650 |
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0 |
|a Nanotechnology
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| 650 |
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0 |
|a Microfabrication
|
| 952 |
|
|
|a GrAtEKP
|b 59ccf8186c5ad134460d7434
|c 998a
|d 945l
|e 620.5 MadM f 2012 3
|t 3
|x m
|z Books
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