Fundamentals pf microfabrication and nanotechnology/
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton:
CRC Press,
2012
|
| Edition: | 3rd |
| Subjects: |
| Physical Description: | 3 v. : ill., diagrs, tabs ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9781420055115 9781420055191: 9781420055160: |