|
|
|
|
| LEADER |
00721nam a2200205 a 4500 |
| 001 |
927956 |
| 005 |
20171111231402.0 |
| 008 |
020514s1990 nyu erbi 001 0 eng d |
| 020 |
|
|
|a 0824782429
|
| 040 |
|
|
|a TEIK
|b gre
|
| 082 |
|
0 |
|2 21
|a 621.38152
|
| 100 |
1 |
|
|a Donovan, Robert P.
|
| 245 |
1 |
0 |
|a Partical control for semiconductor manufacturing/
|c Robert P. Donovan
|
| 260 |
|
|
|a New York:
|b Marcel Dekker,
|c 1990
|
| 300 |
|
|
|a 464σ. :
|b εικ. ;
|c 27εκ.
|
| 504 |
|
|
|a Περιέχει βιβλιογραφία και ευρετήριο
|
| 650 |
1 |
0 |
|a Semiconductors
|x Design and construction
|
| 650 |
1 |
0 |
|a Semiconductors
|x Defects
|
| 650 |
1 |
0 |
|a Particles
|
| 952 |
|
|
|a GRThAnMak
|b 59cc97396c5ad1344600873f
|c 998a
|d 945l
|e 621.38152 DON
|t 1
|x m
|z Books
|
