Description: Partical control for semiconductor manufacturing/

Main Author:	Donovan, Robert P.
Format:	Book
Language:	English
Published:	New York: Marcel Dekker, 1990
Subjects:	Semiconductors > Design and construction Semiconductors > Defects Particles

Physical Description:	464σ. : εικ. ; 27εκ.
Bibliography:	Περιέχει βιβλιογραφία και ευρετήριο
ISBN:	0824782429