Micromechanics and mems: Classic and seminal papers to 1990/
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York:
IEEE,
1997
|
| Subjects: |
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York:
IEEE,
1997
|
| Subjects: |