Cover Image

Micromechanics and mems: Classic and seminal papers to 1990/

Other Authors: Trimmer, William S.
Format: Book
Language:English
Published: New York: IEEE, 1997
Subjects:
Microelectronics
Physical Description:704σ. : εικ.
Bibliography:Περιέχει βιβλιογραφία και ευρετήριο
ISBN:0780310853

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