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00693nam a2200217 a 4500 |
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20171111231055.0 |
| 008 |
971119s1995----gr r u000 0 Eng d |
| 020 |
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|a 0750303115
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| 040 |
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|a GR-AtNTU
|b gre
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| 082 |
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|a 621.38152
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| 245 |
1 |
0 |
|a Handbook of thin film process technology /
|c editors David A. Glocker, S. Ismat Shah.
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| 260 |
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|a Bristol:
|b IOP,
|c c1995
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| 300 |
|
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|a 1 v. (various pagings) :
|b ill. ;
|c 31 cm.
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| 500 |
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|a In a folder.
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| 504 |
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|a Includes appendices and index.
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| 650 |
1 |
0 |
|a Thin films
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| 650 |
1 |
0 |
|a Thin films circuits
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| 700 |
1 |
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|a Glocker, David A
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| 700 |
1 |
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|a Ismat, Shah
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| 952 |
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|a GR-AtNTU
|b 59cc22866c5ad13446f8d4cf
|c 998a
|d 945l
|e 62138152
|t 1
|x m
|z Books
|
