Description: Handbook of thin film process technology /

Other Authors:	Glocker, David A, Ismat, Shah
Format:	Book
Published:	Bristol: IOP, c1995
Subjects:	Thin films Thin films circuits

Item Description:	In a folder.
Physical Description:	1 v. (various pagings) : ill. ; 31 cm.
Bibliography:	Includes appendices and index.
ISBN:	0750303115