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|a 621.3815/2
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| 245 |
1 |
0 |
|a IEEE transactions on semiconductor manufacturing :
|b a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council
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| 246 |
1 |
3 |
|a Transactions on semiconductor manufacturing
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| 260 |
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|a Semiconductor manufacturing
|b Institute of Electrical and Electronics Engineers,
|c c1988-
|a New York, N.Y.:
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| 300 |
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|a τ. :
|b εικ. ;
|c 28 εκ.
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| 500 |
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|a Τίτλος από το εξώφυλλο
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| 650 |
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0 |
|a Semiconductors
|x Design and construction
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| 710 |
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|a Institute of Electrical and Electronics Engineers
|x Periodicals
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| 710 |
0 |
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|a IEEE Components, Hybrids, and Manufacturing Technology Society
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| 710 |
0 |
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|a IEEE Electron Devices Society
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| 710 |
0 |
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|a IEEE Reliability Society
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| 710 |
0 |
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|a IEEE Solid-State Circuits Council
|
| 710 |
0 |
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|a Institute of Electrical and Electronics Engineers
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| 952 |
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|a GR-KoDPT
|b 59cc22516c5ad13446f8cafb
|c 998a
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