MEMS: design and fabrication/
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton:
CRC Press: Taylor & Francis,
2006
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| Edition: | 2nd ed. |
| Series: | Mechanical engineering series / Frank Kreith, Roop Mahajan
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| Subjects: |
| Physical Description: | ποικ. αριθμ. : εικ., σχ. |
|---|---|
| ISBN: | 0849391385 |