Intrinsic point defects, impurities, and their diffusion in silicon /
| Main Author: | |
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| Format: | Book |
| Published: |
Wien:
Springer,
c2004
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| Series: | Computational microelectronics
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| Subjects: |
| Physical Description: | xxi, 554 p. : fig. ; 24 cm. |
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| Bibliography: | Includes bibliographical references, index. |
| ISBN: | 3211206876 |